Peroxidizer
Jun 2020
Oxidant Comparison
Author(s): Daniel Alvarez, PhD
Feb 2020
Sacrificial hardmask ALD with hydrogen peroxide: comparative study of low temperature growth and film characteristics for TiO2 and Al2O
Author(s): Dr. Daniel Alvarez, Keisuke Andachi, Gaku Tsuchibuchi, Katsumasa Suzuki, Jeff Spiegelman
Mar 2019
Decomposition of Hydrogen Peroxide in the Gas Phase
Author(s): Jeff Spiegelman
Products
Brute Peroxide, Peroxidizer
Jun 2016
Hydrogen Peroxide Gas Delivery for Atomic Layer Deposition, Annealing, and Surface Cleaning in Semiconductor Processing
Author(s): Jeffrey Spiegelman, Russ Holmes and Zohreh Shamsi
Products
Brute Peroxide, Peroxidizer
Applications
ALD (Oxide/Nitride), Surface Clean / Modification
Feb 2016
Anhydrous Hydrogen Peroxide Gas Delivery for Atomic Layer Deposition
Author(s): Daniel Alvarez, Jr., Jeffrey Spiegelman
Jun 2015
ALD of Al2O3 using H2O2 Vapor
Author(s): Adam Hinckley, Pablo Mancheno, and Anthony Muscat
Jan 2015
Cheating Raoult’s Law to Enable Delivery of Hydrogen Peroxide as a Stable Vapor
Author(s): Daniel Alvarez and Jeffrey Spiegelman
Products
Brute Peroxide, Peroxidizer
Applications
ALD (Oxide/Nitride), Surface Clean / Modification
Jun 2009
Comparison of hydrogen peroxide and ozone for use in zirconium oxide atomic layer deposition
Author(s): Daniel Alvarez, Jeffrey Spiegelman