Al2O3
Mar 2020
Advantages of Hydrogen Peroxide in Spacer and Hard Mask ALD
Author(s): Daniel Alvarez, PhD
Feb 2020
Sacrificial hardmask ALD with hydrogen peroxide: comparative study of low temperature growth and film characteristics for TiO2 and Al2O
Author(s): Dr. Daniel Alvarez, Keisuke Andachi, Gaku Tsuchibuchi, Katsumasa Suzuki, Jeff Spiegelman
Jun 2015
ALD of Al2O3 using H2O2 Vapor
Author(s): Adam Hinckley, Pablo Mancheno, and Anthony Muscat