BRUTE Peroxide
Aug 2026
Controlled Interface Oxidation of Ru through High Concentration H2O2
Author(s): Dan N. Le, Austen C. Adams, Dushyant M. Narayan, Minjong Lee, Walter Hernandez, Lorenzo Diaz, Adrian Alvarez, and Jiyoung Kim
Products
BRUTE Peroxide
Aug 2024
Aug 2024
Jun 2024
Selective Co ALD for Chiplet-to-Wafer and Wafer to Wafer Bonding
Author(s): IITC Interconnect 2024 (San Jose)
Products
BRUTE Hydrazine, BRUTE Peroxide
Applications
ALD (Oxide/Nitride), Surface Clean / Modification
Jun 2020
Oxidant Comparison
Author(s): Daniel Alvarez, PhD
Mar 2020
Advantages of Hydrogen Peroxide in Spacer and Hard Mask ALD
Author(s): Daniel Alvarez, PhD
Feb 2020
Sacrificial hardmask ALD with hydrogen peroxide: comparative study of low temperature growth and film characteristics for TiO2 and Al2O
Author(s): Dr. Daniel Alvarez, Keisuke Andachi, Gaku Tsuchibuchi, Katsumasa Suzuki, Jeff Spiegelman
Apr 2019
AF2-MoP16 ALD HfO2 with Anhydrous H2O2 in a 300 mm Cross-flow Reactor – Comparison with H2O and O3 Oxidants
Author(s): Steven Consiglio, R. Clark, C. Wajda, G. Leusink