Brute Peroxide

Anhydrous Hydrogen Peroxide Gas in Precursor Format

BRUTE® Peroxide is more reactive than water vapor or ozone

RASIRC BRUTE Peroxide Benefits

Provides H₂O₂ gas with minimal water
Differentiates between H₂O₂ and water in process reactions
Reacts faster and at lower temperatures than water
Removes carbon and hydroxylates interface surfaces
Improves compatibility with metal surfaces—less aggressive oxidant than ozone or O₂ Plasma
Superior penetration into 3D high aspect ratio microstructures
Allows high concentration H₂O₂ delivery into vacuum and low pressure applications
Increases interface hydroxyl density on Si, Ge and SiGe films
Enables in situ cleaning without liquid
Proprietary delivery process, ensuring higher purity

RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.

7815 Silverton Avenue
San Diego, CA 92126
USA