Brute Peroxide

Anhydrous Hydrogen Peroxide Gas in Precursor Format

BRUTE® Peroxide is more reactive than water vapor or ozone

RASIRC BRUTE Peroxide Benefits

  • Provides H2O2 gas with minimal water
  • Differentiates between H2O2 and water in process reactions
  • Reacts faster and at lower temperatures than water
  • Removes carbon and hydroxylates interface surfaces
  • Improves compatibility with metal surfaces—less aggressive oxidant than ozone or O2 Plasma
  • Superior penetration into 3D high aspect ratio microstructures
  • Allows high concentration H2O2 delivery into vacuum and low pressure applications
  • Increases interface hydroxyl density on Si, Ge and SiGe films
  • Enables in situ cleaning without liquid
  • Proprietary delivery process, ensuring higher purity
Hydrazine Gas Delivery System

RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.


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San Diego, CA 92126

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