Brute Peroxide
Aug 2024
Aug 2024
Jun 2024
Selective Co ALD for Chiplet-to-Wafer and Wafer to Wafer Bonding
Author(s): IITC Interconnect 2024 (San Jose)
Products
Brute Hydrazine, Brute Peroxide
Applications
ALD (Oxide/Nitride), Surface Clean / Modification
Jun 2020
Oxidant Comparison
Author(s): Daniel Alvarez, PhD
Mar 2020
Advantages of Hydrogen Peroxide in Spacer and Hard Mask ALD
Author(s): Daniel Alvarez, PhD
Feb 2020
Sacrificial hardmask ALD with hydrogen peroxide: comparative study of low temperature growth and film characteristics for TiO2 and Al2O
Author(s): Dr. Daniel Alvarez, Keisuke Andachi, Gaku Tsuchibuchi, Katsumasa Suzuki, Jeff Spiegelman
Apr 2019
AF2-MoP16 ALD HfO2 with Anhydrous H2O2 in a 300 mm Cross-flow Reactor – Comparison with H2O and O3 Oxidants
Author(s): Steven Consiglio, R. Clark, C. Wajda, G. Leusink
Mar 2019
Decomposition of Hydrogen Peroxide in the Gas Phase
Author(s): Jeff Spiegelman
Products
Brute Peroxide, Peroxidizer