BRUTE Hydrazine

Low Temperature Tungsten Nitride for Metal Diffusion Barriers Using BRUTE Hydrazine

Author(s): Dan N Le, Soubhik De, Thi Thu Huong Chu, Dushyant M Narayan, Doo San Kim, Maxim Markevitch, Jeffery Spiegelman, and Jiyoung Kim

Deposition of High Thermal Conductivity AlN Heat Spreader Films

Author(s): Scott T. Ueda, Aaron McLeod, Michelle Chen, Chris Perez, Eric Pop, Dan Alvarez, Andrew C. Kummel

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