Brute Hydrazine

Deposition of High Thermal Conductivity AlN Heat Spreader Films

Author(s): Scott T. Ueda, Aaron McLeod, Michelle Chen, Chris Perez, Eric Pop, Dan Alvarez, Andrew C. Kummel

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Effect of Vapor-phase Cleaning Using Anhydrous N2H4 on Cu and Co for Area-Selective Atomic Layer Deposition

Author(s): Jin-Hyun Kim,a,b Sang Woo Kim, Su Min Hwang, Harrison Sejoon Kim, Yong Chan Jung, Luis Fabißn Pe±a, Kui Tan, Jean-Francois Veyan, Rino Choi, Daniel Alvarez, Jeff Spiegelman, and Jiyoung Kim