Comparison of hydrogen peroxide and ozone for use in zirconium oxide atomic layer deposition

Daniel Alvarez, Jeffrey Spiegelman

Get full report

Products:
,

Applications:

Films:

Back to all Resources

All Resources

June 2009

Get the Full Research Report

Fill out the form below to request the full PDF of this report.

Resource Request

This field is for validation purposes and should be left unchanged.
Name(Required)
Scroll to Top