RASIRC Event Participation

Recent and Upcoming Events

IITC 2024 - International Interconnect Technology Conference

IITC Conference 2024

Atomic Layer Deposition of TiN in Horizontal Vias Using Hydrazine as Nitrogen Precursor (Student Paper)
Jannick Fammels, Ping Che Lee, Dipayan Pal, Julian Pilz, Dmytro Solonenko, Jeffrey Spiegelman, Andrew Kummel – University of California, San Diego; Silicon Austria Labs, RASIRC

With decreasing feature size and changes in 3D DRAM and NAND architecture, TiN diffusion barriers for Cu and W metallization must become thinner and extremely conformal in horizontal structures. Titanium tetrachloride (TiCl4) and anhydrous hydrazine (N2H4) are promising precursors for low resistivity TiN atomic layer deposition (ALD). In this work these precursors were investigated for developing a particle free TiN ALD process with extremely high conformality in horizontal vias.

June 3-6, 2024 – San Jose, CA

IITC 2024 - International Interconnect Technology Conference

IITC Conference 2024

P9. Selective Co ALD for Chiplet-to-Wafer and Wafer-to-Wafer Bonding (Student Paper)
Cheng Hsuan Kuo, Madison Manley, Dipayan Pal, Rohan Sahay, Ravi Kanjolia, Mansour Moinpour, Jacob Woodruff, Jeffrey Spiegelman, Muhannad Bakir, Andrew Kummel – UCSD, Georgia Institute of Technology, EMD Electronics, RASIRC

Cyclic clean treatment by using strong oxidant: HOOH and reductant: N2H4 ¬was developed for Cu cleaning which can be applied in the inverse hybrid metal bonding process. Compared to UHV anneal at higher temperature (415C), cyclic clean process is only performed at 340C with lower surface impurities. Also, highly selective Co ALD is deposited on metal Cu but not on SiO2 even after 1000 ALD cycles.

June 3-6, 2024 – San Jose, CA

ALD/ALE 2024 - August 4-7, Helsinki, Finland

ALD/ALE 2024

RASIRC will be presenting Poster and Exhibiting.

August 4-7, 2024 – Helsinki, Finland

Electronic Specialty Gases & Systems

RASIRC will presenting a talk on “Delivering Hydrazine and Hydrogen Peroxide for ALD” at Gila River Resorts, Wild Horse Pass. More info.

October 22-24, 2024 – Chandler, AZ

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RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.


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