RASIRC
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BRUTE Hydrazine Datasheet
RASIRC BRUTE Hydrazine delivers waterfree hydrazine (N2H4) gas into atomic layer deposition (ALD) processes in a repeatable method. BRUTE Hydrazine includes a vaporizer pre-loaded with hydrazine and a proprietary solvent. BRUTE Hydrazine can be used for a variety of metal nitride deposition processes at temperatures below 400°C.
PUBLISHED JULY 2018
4 MINUTE READ
Peroxidizer Datasheet
The RASIRC Peroxidizer provides a safe, reliable way to deliver high-concentration hydrogen peroxide gas into ALD, annealing, dry surface preparation and cleaning processes.
PUBLISHED IN 2018
4 MINUTE READ
BRUTE Peroxide Datasheet
RASIRC BRUTE Peroxide provides a breakthrough method to deliver virtually water-free hydrogen peroxide (H2O2) gas into Atomic Layer Deposition (ALD) and Etch (ALE) processes. BRUTE Peroxide solution is preloaded in a RASIRC vaporizer. This solution combines hydrogen peroxide liquid and a proprietary solvent, which ensures that the liquid source remains below 30% by weight hydrogen peroxide.
PUBLISHED 2017
4 MINUTE READ
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RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.
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