Metal-Nitride
Mar 2026
Low Temperature Tungsten Nitride for Metal Diffusion Barriers Using BRUTE Hydrazine
Author(s): Dan N Le, Soubhik De, Thi Thu Huong Chu, Dushyant M Narayan, Doo San Kim, Maxim Markevitch, Jeffery Spiegelman, and Jiyoung Kim
Jun 2017
BRUTE Hydrazine for Low Temperature Metal-Nitride ALD: Low Resistivity and Oxygen-Free Films Enabled by Ultra-High Purity
Author(s): Daniel Alvarez and Jeffrey Spiegelman