AlN

Deposition of High Thermal Conductivity AlN Heat Spreader Films

Author(s): Scott T. Ueda, Aaron McLeod, Michelle Chen, Chris Perez, Eric Pop, Dan Alvarez, Andrew C. Kummel

Low Temperature Crystalline AlN ALD with Hydrazine

Author(s): Professor Andrew C. Kummel (UCSD)

Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source

Low temperature Aluminium Nitride Deposition: Comparing Hydrazine and Ammonia

Author(s): Aswin L.N. Kondusamy, Su Min Hwang, Zhiyang Qin, Antonio T. Lucero, Xin Meng, Dan Alvarez Jr., Jeff Spiegelman, Jiyoung Kim