Droplet-Free Water Vapor for Oxidation
The RainMaker Humidification System (RHS) is a precisely controlled oxide source for droplet-free deposition.
The RainMaker Humidification System (RHS) Enables Semiconductor Applications
VCSELs
VCSELs (Vertical-Cavity Surface-Emitting Laser) are used in a growing number of devices. These structures require precise oxidation of the aperture to form the laser channel. Aperture oxidation is controlled via process temperature, composition of the aperture structure, and water vapor delivered into the process chamber. The RHS delivers precisely controlled, ultrapure water vapor.
Precision Thermal Oxidation
Precision water-vapor delivery is difficult with standard market products. Bubblers and Flash Vaporizers are particle generators, and will hit wafers with microdroplets. This causes non-uniform oxidation and island growth on the wafer surface.
High Performance Thermal Oxides
High performance oxides require high density, high refractive index and excellent dielectric properties. Ultra-high purity water vapor is needed. Ionic contamination, organic contamination, particles, and dissolved gases are typical in traditional water-vapor delivery products. These impurities can interfere with high performance processes, leading to poor electrical characteristics, non-uniformity and other defects.
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How the RHS Works
The RHS adds controlled amounts of pure water vapor directly into any carrier gas stream. Needing only filtered house de-ionized (DI) water and power, the system delivers precise amounts of water vapor into atmospheric processes.
The RHS is an integrated water vapor delivery system featuring adaptive closed loop control. Process parameters are set through automated process recipes or the controller touchscreen. Internal pressure, flow and temperature sensors provide feedback to the control system, which automatically adjusts operations to maintain required temperature and concentration stability.
The RHS consists of a non-porous membrane that excludes particles, micro-droplets, volatile gases, and other opposite charged species from being transferred to the carrier gas and ensures only water vapor is added. The membrane selects only the source gas molecules. Other contaminants in the liquid source cannot permeate across the membrane or enter the carrier gas stream, resulting in a saturated product that is consistent and pure.
RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.
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