RASIRC Peroxidizer® 8.1
Concentrated H202 Gas Delivery
High Concentration Hydrogen Peroxide Gas Delivery System
The RASIRC Peroxidizer provides a safe, reliable way to deliver high-concentration hydrogen peroxide gas into ALD, annealing, dry surface preparation and cleaning processes.
. Safely concentrates H202 from semiconductor grade 30% weight H202
. Flows H202 gas to process at up to 50,000 ppm, depending on flow rate
. Delivers high purity H202 without entrained droplets or decomposition
Peroxidizer Beats Traditional Delivery Methods
The Peroxidizer delivers 10x concentration of hydrogen peroxide gas at a given temperature and delivers droplet-free gas at temperatures as low as 80 °C. The Peroxidizer delivers up to 5% hydrogen peroxide gas by volume from 30% hydrogen peroxide liquid solution.
Bigger Precursor Range
New materials and architectures are more temperature sensitive than their predecessors, such as SiGe and new memory alloys, forcing lower thermal budgets. Hydrogen peroxide gas from the Peroxidizer has higher reactivity at lower temperature, increasing the range of precursors available to process engineers.
Hydrogen peroxide gas readily converts to highly reactive OH radicals , creating a high density ALD nucleation and faster reactions with precursors. Oxygen plasma can penetrate below the interface layer, damaging the bottom electrode and surface structures. Plasma cannot reach the bottom of deep structures as it requires line-of-sight, so coatings may be non-uniform, favoring the top of the structure.
High concentration hydrogen peroxide gas delivered by the Peroxidizer creates a dense hydroxylated layer at a lower operating temperature than other oxidants. To achieve the same level of reactivity, water requires higher process temperatures that are not compatible with new materials.
RASIRC Granted Patent for Controlled Delivery of Hydrogen Peroxide Gas
A novel method for generation of H2O2 gas enables more accurate and repeatable delivery of hydrogen peroxide gas into a wide range of flow rates, operating pressures, and temperatures.
RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.
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