Low Temperature Thermal ALD TiNx and TaNx Films from Anhydrous N2H4

Steven Wolf, Michael Breeden, Mahmut Kavrik, Jun Hong Park, Russell Holmes, Daniel Alvarez, Jeffrey Spiegelman, and Andrew C. Kummel

Get full report

Products:

Applications:

Films:
,

Back to all Resources

All Resources

June 2018

Get the Full Research Report

Fill out the form below to request the full PDF of this report.

Resource Request

This field is for validation purposes and should be left unchanged.
Name(Required)
Scroll to Top