Aswin L.N. Kondusamy, Antonio T. Lucero, Su Min Hwang, Xin Meng, Harrison S. Kim, Jaebeom Lee, Dan Alvarez Jr., Jeff Spiegelman, Jiyoung Kim
All Resources
June 2018
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Products: Brute Hydrazine
Applications: ALD (Oxide/Nitride)
Films: Si3N4