Low Resistance ALD TiNx from Low Temperature Thermal TiCl4 + Anhydrous N2H4
Steven Wolf, M. Kavrik, S. Ueda, M. Breeden1 J. Park, R. Holmes, Daniel Alvarez, Jeffrey Spiegelman, and Andrew C. Kummel
June 2019
Get the full research report
Enter your email to request the full PDF of this report.