Reducing Agent & Nitride Source
Low Temperature, High Aspect Ratio
Hydrazine is an excellent low temperature thermal ALD nitride source as well as an excellent reducing agent. Next generation devices have low thermal budgets and high aspect ratio structures that create new challenges for conformal nitride films. Traditional solutions cannot meet these new challenges. Thermal ammonia does not yield quality nitride films below 400°C. Plasma does not deliver the step coverage and conformality needed for high aspect ratio structures and causes surface damage.
Advantages of Hydrazine Gas
- Highly reactive, enabling thermal ALD at much less than 400°C
- No line of sight required, providing uniform films on high aspect ratio structures
- No oxygen or carbon, eliminating contamination
- Fewer device defects
- Better electrical performance
- Strong reducing agent for surface conditioning/cleaning of various metals
Hydrazine Gas Delivery System
Get independent research results
See BRUTE Hydrazine test results that demonstrate it's advantages over alternative gases.