News

RASIRC Presents Process Control ‘Ins and Outs’ for Optimized Mass Delivery

March 14, 2019

Effective Silicon and Metal Nitride Deposition at Reduced Temperature

November 15, 2018

RASIRC Presents New Oxidant Options for Low Temperature Dielectric ALD

October 18, 2018

RASIRC Presents Results of Silicon Nitride Deposition Study at AiMES Conference

September 30, 2018

RASIRC low temperature ALD of silicon and metal nitrides

July 27, 2018

RASIRC in collaboration with The University of Texas, Dallas has recently developed a low temperature thermal ALD process using the standard silicon precursor in CVD, HCDS and their new hydrazine formulation for a liquid source anhydrous hydrazine in a proprietary solvent. Read the full article here.

RASIRC Presents Low Temperature Silicon Nitride ALD at Annual ALD Conference

July 27, 2018

RASIRC will present the latest research findings on both hydrogen peroxide gas and hydrazine gas at the annual ALD Conference.

RASIRC to Present Anhydrous Hydrogen Peroxide Surface Preparation and Enhanced Nucleation for ASD at ASD2018

April 24, 2018

RASIRC and their collaborative network of leading scientists and customers around the world have in recent years conducted exciting work with anhydrous hydrogen peroxide. Read the full article here.

RASIRC Presents Alternative Method for Aperture Oxidation in VCSELs

April 11, 2018

RASIRC announced today that the company will present at VCSEL Day 2018, held April 12-13, 2018 in Ulm, Germany.

RASIRC Turns Thermal Mass Flow Measurement of Dilute Reactive Gas Species Inside Out

March 19, 2018

The presentation will discuss the importance of precursor gas flow measurement independent of carrier gas flow and will provide experimental performance data with hydrogen peroxide gas.

RASIRC to present New ALD chemistries for low temperature oxide and nitride films at ALD4Industry

January 4, 2017

We are very happy to announce that have received a late news abstract from RASIRC out of San Diego, USA, for a presentation to be given at the EFDS Workshop “ALD for Industry” entitled “New ALD chemistries for low temperature oxide and nitride films”. RASIRC is also sponsoring the workshop and will have a stand the the exhibition. Read the full article here.