News

RASIRC low temperature ALD of silicon and metal nitrides

July 27, 2018

RASIRC in collaboration with The University of Texas, Dallas has recently developed a low temperature thermal ALD process using the standard silicon precursor in CVD, HCDS and their new hydrazine formulation for a liquid source anhydrous hydrazine in a proprietary solvent. Read the full article here.

RASIRC Presents Low Temperature Silicon Nitride ALD at Annual ALD Conference

July 27, 2018

RASIRC will present the latest research findings on both hydrogen peroxide gas and hydrazine gas at the annual ALD Conference.

RASIRC to Present Anhydrous Hydrogen Peroxide Surface Preparation and Enhanced Nucleation for ASD at ASD2018

April 24, 2018

RASIRC and their collaborative network of leading scientists and customers around the world have in recent years conducted exciting work with anhydrous hydrogen peroxide. Read the full article here.

RASIRC Presents Alternative Method for Aperture Oxidation in VCSELs

April 11, 2018

RASIRC announced today that the company will present at VCSEL Day 2018, held April 12-13, 2018 in Ulm, Germany.

RASIRC Turns Thermal Mass Flow Measurement of Dilute Reactive Gas Species Inside Out

March 19, 2018

The presentation will discuss the importance of precursor gas flow measurement independent of carrier gas flow and will provide experimental performance data with hydrogen peroxide gas.

RASIRC to present New ALD chemistries for low temperature oxide and nitride films at ALD4Industry

January 4, 2017

We are very happy to announce that have received a late news abstract from RASIRC out of San Diego, USA, for a presentation to be given at the EFDS Workshop “ALD for Industry” entitled “New ALD chemistries for low temperature oxide and nitride films”. RASIRC is also sponsoring the workshop and will have a stand the the exhibition. Read the full article here.

Grow Low Temperature Nitrides by Atomic Layer Deposition Without Plasma

December 14, 2016

Unique Hydrazine formulation and package enables HAR and 3D film studies for Laboratories. Read the full article here.

RASIRC BRUTE peroxide and hydrazine technology for leading edge memory and high performance logic

September 26, 2016

Hydrogen peroxide (H2O2) gas is an oxidant that improves passivation and nucleation density at semiconductor interfaces, potentially leading to reduced interfacial defect density. Read the full article here.

Hydrogen Peroxide Gas Delivery for ALD, Annealing, and Surface Cleaning in Semiconductor Processing

June 22, 2016

Hydrogen Peroxide Gas (HPG) is a powerful and versatile oxidant for processing new materials and 3D structures. HPG is now available in stable, high concentration and offers significant benefits to ALD, annealing and cleaning applications. Read the full article here.

Rocket Fuel may Propel Moore’s Law

April 6, 2016

Jonas Sundqvist, co-chair of the CMC 2016, while working with Fraunhofer (fraunhofer.de) showed that hydrazine and it’s derivatives provide unique advantages as a nitrogen source in thermal atomic-layer deposition (ALD). Read the full article here.