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RASIRC
  • Products
    • BRUTE Hydrazine
    • BRUTE Peroxide
    • Peroxidizer
  • Applications
    • Oxides
    • Nitrides
  • Resources
    • Technical Resources
    • ALD Oxide Wizard
    • ALD Nitride Wizard
    • Research Partners
  • About
    • About RASIRC
    • Our Team
    • News
    • Events
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Area Selective Atomic Layer Deposition (ASD)

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  • Area Selective Atomic Layer Deposition (ASD)
Apr 2024

Inhibitor Free Area Selective Atomic Layer Deposition (AS-ALD) of dielectric materials on Cu surface for Interconnect applications

Products
Brute Hydrazine

Applications
ALD (Oxide/Nitride), Area Selective Atomic Layer Deposition (ASD), Surface Clean / Modification

Films
Cu, SiO2

Apr 2024

Vapor Phase surface cleaning of Cobalt for novel interconnect applications

Products
Brute Hydrazine

Applications
ALD (Oxide/Nitride), Area Selective Atomic Layer Deposition (ASD), Surface Clean / Modification

Films
Cu, SiO2

Jun 2020

Effect of Vapor-phase Cleaning Using Anhydrous N2H4 on Cu and Co for Area-Selective Atomic Layer Deposition

Author(s): Jin-Hyun Kim,a,b Sang Woo Kim, Su Min Hwang, Harrison Sejoon Kim, Yong Chan Jung, Luis Fabißn Pe±a, Kui Tan, Jean-Francois Veyan, Rino Choi, Daniel Alvarez, Jeff Spiegelman, and Jiyoung Kim

Products
Brute Hydrazine

Applications
Area Selective Atomic Layer Deposition (ASD), Surface Clean / Modification

Films
Co, Cu

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